Overview
| Votage | 380V | Power supply | KGPS/IGBT |
| Heater, muffle material | graphite /CFC | High Temperaure Volume | 600×1200mm |
| Place of Origin | Hunan.China | Condition | New |
| Heating method | Resistance heating/induction heating | Machinery Test Report | Provided |
| Video outgoing-inspection | Provided | Warranty | 1 year |
| Core Components | PLC | Brand Name | Jingtan |
| Certificates | ISO9001:2015/CE | Transport Package | Standard Exporting Wooden Box |
| Structure | Vertical or horizontal,Square or Round shape | Service Provided | Video technical support |
| After-sales Service Provided | Field maintenance and repair service | ||
Product Details
Vacuum deposition furnace
The Vacuum deposition furnace is used for the preparation of carbon-carbon composite materials, and the deposition furnace is mainly used for the preparation of pyrolytic carbon coating on the surface of graphite, semiconductor devices and heat-resistant scour materials.
Scope of application:
Graphite, semiconductor devices, heat-resistant scour materials.
1. Basic Parameters:
1) Design temperature: 1250℃/1650℃/1800℃/2200℃
2) Common temperature: 900~1200℃
3) Vacuum degree: < 50Pa
4) Pressure rise rate: 6.67pA /h(or 150Pa/24h) in cold state of empty furnace
5) Heating mode: graphite resistance heating or induction heating, independent temperature control, good temperature uniformity
6) Atmosphere medium: vacuum /CH4/C3H6/H2/N2/Ar
7) Gas control mode: mass flow meter control, multi-channel gas path, uniform flow field, no deposition dead Angle, good deposition effect;
Multi-stage and efficient exhaust treatment system, environmentally friendly, easy to clean up;
8) Furnace type: square, round, vertical or horizontal structure (non-standard design), fully enclosed deposition chamber, good sealing effect, strong anti-pollution ability;
9) Furnace cooling mode: furnace shell water cooling, external circulation quick cooling system can be selected, short cooling time, high production efficiency;
2. Structure of vacuum deposition furnace:
Structure form: horizontal - side discharge, vertical - up/down discharge
Furnace door locking mode: manual/automatic
Furnace shell material: inner stainless steel/all stainless steel
Insulation material: carbon felt/graphite felt/carbon fiber cured felt
Heater, muffle material: graphite /CFC
Infrared instrument: single colorimetric/double colorimetric
Power supply: KGPS/IGBT(only suitable for medium frequency heating)
3、Produce Specification
